The integration of 2-D periodic nanopattern defined by nanoimprint lithography and dry etching into aluminum-induced crystallization-based polycrystalline silicon thin-film solar cells is investigated experimentally. Compared with the unpatterned cell, an increase of 6% in the light absorption has been achieved thanks to the nanopattern, which, in turn, increased the short-circuit current from 20.6 to 23.8 mA/cm2. The efficiency, on the other hand, has limitedly increased from 6.4% to 6.7%. We show using the transfer length method that the surface topography modification caused by the